快速熱退火爐
- 公司名稱(chēng) 東方銳進(jìn)(香港)有限公司
- 品牌
- 型號(hào)
- 產(chǎn)地 韓國(guó)Ecopia
- 廠商性質(zhì) 經(jīng)銷(xiāo)商
- 更新時(shí)間 2017/7/20 5:45:03
- 訪問(wèn)次數(shù) 953
聯(lián)系我們時(shí)請(qǐng)說(shuō)明是化工儀器網(wǎng)上看到的信息，謝謝!
接觸角測(cè)量?jī)x；表面張力儀；LB膜分析儀；微張力儀；高通量微張力儀；便攜式全自動(dòng)表面張力儀；水活度儀；近場(chǎng)掃描光學(xué)顯微鏡；原子力顯微鏡；實(shí)驗(yàn)室粘度計(jì)；在線粘度計(jì)；高溫粘度計(jì)；高溫表面張力儀；流變儀；霍爾效應(yīng)測(cè)試儀；探針臺(tái)；LED測(cè)試儀；快速熱退火爐；原子層沉積(ALD)；氧彈量熱計(jì)；動(dòng)靜態(tài)光散射儀；顆粒度及zeta電位儀；原位微區(qū)熱分析儀；〈br〉
規(guī)格：
1) Temperature : Max. 1500℃ in vacuum chamber 2) Max 400℃ at the air. 3) Pressure : torr(Ultimate Pressure within minutes by small chamber) 4) PG / PBN Spec : 1300 watt, 220V, 15-25 Ohm, 15 A(max.)
1) PG / PBN Heating Chuck (1 inch, ,2 inch, 3 inch : Circled feature)
2) Temp, control part
3) Gas injection part
Ecopia’s Heat-Treatment System is new concept of adopted PG/PBN electrostatic heater system that combining small-sized ceramic heater, electricity conduction ceramics PG(Pyrolytic Graphite) and electricity insulation ceramics PBN (Pyrolytic Boron Nitride). It is a convenient and useful system that can perform high efficiency,small capacity and high speed responsiveness of small RTA(Rapid Thermal Anneal) by short time of temp rising(1000℃/10sec) , providing uniform temp on surface.
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