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| 型號 | SLL12 | SLLA42 | SLLV42 |
| 分辨率 | <1nm | <1nm | <1nm |
| 負載 | 30N(3kg) | 30N(3kg) | 30N(3kg) |
| 適合真空度 | 10-11 mbar | 10-11 mbar | 10-11 mbar |
| 行程范圍 | 70~475mm | 70~1480mm | 70~1480mm |
| 步進1 | 1-1500nm | 1-1500nm | 1-1500nm |
| 掃描范圍 | >1.5um | >3um | >3um |
| 掃描分辨率 | <1nm | <1nm | <1nm |
| 速度 | >20mm/s | >20mm/s | >20mm/s |
| ***大頻率 | 18.5KHz | 18.5KHz | 18.5KHz |
| 阻尼力Fb | >3N | >5N | >5N |
| ***大正向力Fn | 30N | 30N | 30N |
| ***大升力Fl | >1N | >1.5N | >1.5N |
| 尺寸 | 33.8 x 27 x 13 mm3 | 54 x 60 x 16 mm3 | 54.8 x 60 x 16 mm3 |
| 重量 | 44g | 148g | 148g |
| 鋼軌重 | 59 g / 100 mm | 286 g / 100 mm | 286 g / 100 mm |
| pitch俯仰力矩Mp | 6Nm | 25Nm | 25Nm |
| yaw偏航力矩My | 6Nm | 25Nm | 25Nm |
| roll扭轉力矩Mr | 11Nm | 90Nm | 90Nm |
| Closed-Loop-S 傳感器分辨率 | 1nm | 1nm | 1nm |
| Closed-Loop-S 重復精度 | ± 70 ~450 nm 2 | ± 70 ~450 nm 2 | ± 70 ~450 nm 2 |
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