型 號

DT2B A～R

DT2B S～Z

Model

量程規(guī)格(N2)

5,10,20,30,50,100,200,300,500SCCM
1,2,3,5,10,20,30 SLM

20,30,50,100,200,250,300SLM

Ranges of Flow(N₂)

耐壓

3MPa

Max Pressure

工作壓差

≤10SLM：0.10.5MPa
＞10SLM：0.1～0.3MPa

≤30SLM：0.05～0.3MPa＞30SLM
&≤100SLM 0.10～0.3MPa＞100SLM：0.15～0.3MPa

Operation Pressure

漏率

1×10^-8sccsHe

Leak Integrity

密封材料

氟橡膠Viton，氯丁橡膠Neoprene,
硅橡膠silicon modified rubber

Materials

驅(qū)動(dòng)電源

0～15DVC

Power Supply

接口尺寸

mpression Fittingφ3；φ6；1/4"

mpression Fittingφ6；1/4"；φ8；3/8"；φ10

Fittings

重量

0.55Kg

1.8Kg

Weight